Lasers most appropriate for the application towards short wavelength/ short pulse AliStar-G series AliStar-DU series ■Features ・Long term stability ・Specialized use for processing transparent materials ■Features ・Good power stability ・DUV processing ・Wavelength ・Beam quality ・Repetition rate ・Average power ・Power stability 532 n m M <1.4 5-30 kHz 5 W <1％ ・Wavelength ・Beam quality ・Repetition rate ・Average power ・Power stability 266 n m M <1.4 5-10 kHz 1 W <3％ AliStar-HF series

products laser precision processor soft Xray microscope μ-TAS LASER JOBSHOP link JAEA keihanna exhibition & news 　 Oct.15-17,2008　　 　 Dec.3-5,2008　　 　 Feb.18-20,2009

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